ISBN: 978-981-09-5471-0 DOI: 10.18178/wcse.2015.04.037
Development of MEMS Inertial Sensors at NUST
Abstract— MEMS Inertial Technology Research Center at Nanjing University of Science and
Technology(NUST) has been working on MEMS vibratory gyroscope and MEMS accelerometers
for over 15 years, and now dedicates for higher tactical grade MEMS vibratory gyroscope and
inertial grade MEMS resonant accelerometer(hereinafter referred to as SiVG and SRA respectively).
This paper presents an overview of the operational principles, fabrication, signal processing and
recent developments of the performance of the SiVG and SRA at NUST.
Index Terms— Inertial sensors, MEMS, vibratory gyroscope, resonant accelerometer.
Anping Qiu, Yan Su, Qin Shi, Guoming Xia
School of Mechanical Engineering, Nanjing University of Science and Technology, CHINA
Cite: Anping Qiu, Yan Su, Qin Shi, Guoming Xia, "Development of MEMS Inertial Sensors at NUST," 2015 The 5th International Workshop on Computer Science and Engineering-Information Processing and Control Engineering (WCSE 2015-IPCE), pp.224-230, Moscow, Russia, April 15-17, 2015.