WCSE

Optical and Mechanical Properties of Diamond-Like Carbon Coatings Deposited by Filtered Cathodic Vacuum Arc Deposition

Abstract— Diamond-like carbon (DLC) coating were deposited directly on glass, BaF2, MgF2, Si, Ge, PVC substrates by a FCVA deposition. The deposition process for DLC coating deposition on substrates was optimized. DLC films on different substrates were deposited to investigate mechanical and spectral characteristics. DLC coatings increased surface hardness. The spectral transmittance of the bare and coated substrates in the visible and IR region was measured. DLC layer thickness affects the optical transmittance of the coated substrate. This article is consider the problem of strengthening of optic materials used in the IR and visible spectrum by deposition of diamond like carbon coatings from FCVA method. Experimental studies showed that surface hardening of optical materials by deposition of diamond-like carbon coating improves optical and mechanical properties of these materials.

Index Terms— Filtered cathodic vacuum arc, diamond-like carbon, thin films, antireflective coating, microhardness.

Yury M. Mironov1, Rodion O. Stepanov, Alexey S. Osipk ov, Mstislav O. Makeev, Pavel A. Mikhalev
Bauman Moscow State Technical University, RUSSIA
Anna O. Mironova, Nikolai S. Sedih
New Plasma Technologies LLC, RUSSIA

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Cite: Yury M. Mironov1, Rodion O. Stepanov, Alexey S. Osipk ov, Anna O. Mironova, Mstislav O. Makeev, Pavel A. Mikhalev, Nikolai S. Sedih, "Optical and Mechanical Properties of Diamond-Like Carbon Coatings Deposited by Filtered Cathodic Vacuum Arc Deposition," 2015 The 5th International Workshop on Computer Science and Engineering-Information Processing and Control Engineering (WCSE 2015-IPCE), pp. 295-300, Moscow, Russia, April 15-17, 2015.