ISBN: 978-981-09-5471-0 DOI: 10.18178/wcse.2015.04.049
Optical and Mechanical Properties of Diamond-Like Carbon Coatings Deposited by Filtered Cathodic Vacuum Arc Deposition
Abstract— Diamond-like carbon (DLC) coating were deposited directly on glass, BaF2, MgF2, Si,
Ge, PVC substrates by a FCVA deposition. The deposition process for DLC coating deposition on
substrates was optimized. DLC films on different substrates were deposited to investigate
mechanical and spectral characteristics. DLC coatings increased surface hardness. The spectral
transmittance of the bare and coated substrates in the visible and IR region was measured. DLC
layer thickness affects the optical transmittance of the coated substrate. This article is consider the
problem of strengthening of optic materials used in the IR and visible spectrum by deposition of
diamond like carbon coatings from FCVA method. Experimental studies showed that surface
hardening of optical materials by deposition of diamond-like carbon coating improves optical and
mechanical properties of these materials.
Index Terms— Filtered cathodic vacuum arc, diamond-like carbon, thin films, antireflective coating, microhardness.
Yury M. Mironov1, Rodion O. Stepanov, Alexey S. Osipk ov, Mstislav O. Makeev, Pavel A. Mikhalev
Bauman Moscow State Technical University, RUSSIA
Anna O. Mironova, Nikolai S. Sedih
New Plasma Technologies LLC, RUSSIA
Cite: Yury M. Mironov1, Rodion O. Stepanov, Alexey S. Osipk ov, Anna O. Mironova, Mstislav O. Makeev, Pavel A. Mikhalev, Nikolai S. Sedih, "Optical and Mechanical Properties of Diamond-Like Carbon Coatings Deposited by Filtered Cathodic Vacuum Arc Deposition," 2015 The 5th International Workshop on Computer Science and Engineering-Information Processing and Control Engineering (WCSE 2015-IPCE), pp. 295-300, Moscow, Russia, April 15-17, 2015.