ISBN: 978-981-11-0008-6 DOI: 10.18178/wcse.2016.06.140
Design of MEMS Capacitive Pressure Sensor for Continuous Blood Pressure Monitor
Abstract— The MEMS (Microelectromechanical System) pressure sensor has been investigated and
manufactured into many commercial products; however, the commercial sensor design is not disclosed by the
manufacturers. This paper presents a set of new design parameters for a capacitive pressure sensor which is
aimed at self-manufacturing. This sensor design is capable to be used in a human blood pressure monitor for
continuous measurement. The pressure range to be measured is from 0 KPa to 50 KPa which is in the range
of human blood pressure. Design parameters are analyzed and simulated using COMSOL software. The
pressure sensor of square diaphragm with edge dimension 1000 μm, thickness 15 μm, the gap between plates
3 μm, made of polysilicon is shown to have the best sensitivity for the applied pressure.
Index Terms— MEMS, capacitive pressure sensor.
Diem N. Ho, Vinh Q. Nguyen
Faculty of Computer Engineering, University of Information Technology – VNU-HCM, VIETNAM
Faculty of Electrical and Electronics Engineering, Ho Chi Minh City University of Technology – VNUHCM, VIETNAM
Cite: Diem N. Ho, Ngoc-Hanh Dang, Vinh Q. Nguyen, "Design of MEMS Capacitive Pressure Sensor for Continuous Blood Pressure Monitor," Proceedings of 2016 6th International Workshop on Computer Science and Engineering, pp. 782-787, Tokyo, 17-19 June, 2016.